CVD and CVI Reactor

MPA Industrie proposes design and build of CVD reactors aimed to Chemical Vapor Deposition for coatings, infiltration, graphite purification, and fluoride Ion cleaning process.

These reactors operate from vacuum until atmospheric pressure, in a wide range of temperatures from 500 to 2300°C. The diameter of these reactors is included between 100 mm and 3000 mm for the useful zone.

Most of the case for CVD applications operates under vacuum from 10-2 mbar to several hundred mbar.

 

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The Process

Chemical vapor infiltration is the well-known technique to elaborate ceramic matrix composite such as carbon/carbon or carbon/silicon carbide composites with BN interface. Each time one woven substrate (carbon fibers) or carbon foam is infiltrated with ceramics material. The wide expertise of MPA Industrie in thermal application can be applied to a special high temperature furnace or a fluidized bed reactor.
MPA Industrie CVD proofed solutions are turn-key systems for general applications like graphite coating or ceramics matrix composite.

The systems are supplied in conformity with EEC rules, 2014/35/EU (electrical safety and low voltage directive), 2006/42/EG (machinery directive), 2014/68/EU (pressure equipment directive), 2001/95/ EG (general product safety directive) and EC certification. UL certification are available too.

Our expertise

Chemical vapor infiltration is the well-known technique to elaborate ceramic matrix composite such as carbon/carbon or carbon/silicon carbide composites with BN interface. Each time one woven substrate (carbon fibers) or carbon foam is infiltrated with ceramics material. The wide expertise of MPA Industrie in thermal application can be applied to a special high temperature furnace or a fluidized bed reactor.

The chemical vapor reactor at a glance

Customized CVD/CVI reactors designed for current operations involving BN, SiC, TaC, ZrC, HfC, and PYC deposition for CMC applications.

Overview of the product data:

  • Available chamber diameter (mm): 400,600, 900, 1200, 1600, 2500
  • Available chamber height (mm): 750 to 3500
  • Other dimensions on request
  • Payload (kg): 50 to 5000
  • Max temperature (°C): 1600 (option 2200)
  • Heating zones: 3 to 4
  • Base pressure (mbar): 0,02
  • Working pressure (mbar): 1 to 1000
  • Reactor type: bottom loading
  • Turntable with adjustable speed (RPM): 0,1 to 3

Download datasheet

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MPA INDUSTRIE
696 rue de Seteyre
ZA Montusclat
43120 La Chapelle d'Aurec
FRANCE