Gas

Special gases are the rough materials for CVD. A special care must be respected to avoid process troubles. These gases are mainly toxic, corrosive, and explosive. All components of the gas panel are semi-conductor type.

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The gas panel is a key component; MPA Industrie supplies the gas cabinet with all the required safety devices (Venting, gas detection) to respect ATEX Directives.

Gas dosing panel

Liquid source dosing assembly

Gas system & scrubber

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MPA INDUSTRIE
696 rue de Seteyre
ZA Montusclat
43120 La Chapelle d'Aurec
FRANCE

Phone: +33 (0) 477 950 335

Email: contact(at)mpa.fr
Web: www.pvatepla-mpa.com