Liquid Source

MPA Industrie has a very long experience in liquid handling and particularly with MTCS, TiCl4, SiCl4, GeCl4…

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Our expertise

Our systems allow to evaporate many liquid precursors. These systems are very reliable and already in service in lots of our customer’s plants. All components are ATEX TYPE. All flushes for maintenance are automatic through HMI control.

Dual liquid source buffer tank

High efficiency evaporator

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MPA INDUSTRIE
696 rue de Seteyre
ZA Montusclat
43120 La Chapelle d'Aurec
FRANCE

Phone: +33 (0) 477 950 335

Email: contact(at)mpa.fr
Web: www.pvatepla-mpa.com