Vacuum

The chemical vapor deposition process is very severe for pump components. It is the reason for what; MPA Industrie has developed relevant technique to pump effluent from CVD process. One consists of modifying liquid ring pump system to be adapted to the CVD. Generally this system is coupled with a scrubber station.
The over technique is based on dry pump mainly adapted for chemical process.
For low pressure application, roots can be added.

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The over technique is based on dry pump mainly adapted for chemical process.
For low pressure application, roots can be added.

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MPA INDUSTRIE
696 rue de Seteyre
ZA Montusclat
43120 La Chapelle d'Aurec
FRANCE